By Luis Castañer
The ongoing development of MEMS (micro-electro-mechanical platforms) complexity, functionality, advertisement exploitation and industry dimension calls for an ever-expanding graduate inhabitants with state of the art expertise.
"Understanding MEMS: ideas and purposes "provides a accomplished creation to this complicated and multidisciplinary expertise that's obtainable to senior undergraduate and graduate scholars from a variety of engineering and actual sciences backgrounds.
Fully self-contained, this textbook is designed to assist scholars seize the foremost ideas and operation of MEMS units and to encourage complex examine or a occupation during this field.
Moreover, with the expanding software parts, product different types and performance of MEMS, pros also will take advantage of this consolidated evaluate, resource of appropriate equations and large suggestions to problems.
Key gains: information the basics of MEMS, permitting readers to appreciate the fundamental governing equations and understand how they observe on the micron scale. robust pedagogical emphasis allowing scholars to appreciate the basics of MEMS units. Self-contained research relief that includes difficulties and suggestions. ebook significant other site hosts Matlab and PSpice codes and viewgraphs.
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Additional info for Understanding Mems: Principles and Applications
Sample text
1, calculate the values of Young’s modulus and the Poisson ratio in the rotated axes. 4. 1, calculate the values of the elements C′11 and C′12 of the stiffness matrix in the rotated axes. 5. 1. 6. 1, calculate the values of the elements of the compliance matrix in the rotated axes. 7. 102) 8. Calculate the rotation matrix when the crystallographic axes are rotated around the z-axis by an angle β. 9. Write Matlab code or similar to calculate the values of the elements C′11 and C′12 of the rotated stiffness matrix when the rotation is around the z-axis and with angles of 15°, 30°, 45°, 60° and 90°.
102) 8. Calculate the rotation matrix when the crystallographic axes are rotated around the z-axis by an angle β. 9. Write Matlab code or similar to calculate the values of the elements C′11 and C′12 of the rotated stiffness matrix when the rotation is around the z-axis and with angles of 15°, 30°, 45°, 60° and 90°. 10. Calculate the values of Young’s modulus and the Poisson ratio in the plane when the rotation is around the z-axis and with angles of 15°, 30° and 45°. The main steps are: a reminder of the static equilibrium conditions and the free body diagram for calculating bending moments and reaction and shear forces; definition of the neutral surface; definition and calculation of the moment of inertia; formulation of the beam differential equation relating the deflection to the bending moment; solution of the beam equation in examples with typical boundary conditions; calculation of the stiffness or elastic constant for microstructures and especially for flexures applying Castigliano’s second theorem; formulation of the rectangular and circular plate differential equation and solution when pressure is applied.
Write Matlab code or similar to calculate the values of the elements C′11 and C′12 of the rotated stiffness matrix when the rotation is around the z-axis and with angles of 15°, 30°, 45°, 60° and 90°. 10. Calculate the values of Young’s modulus and the Poisson ratio in the plane when the rotation is around the z-axis and with angles of 15°, 30° and 45°. The main steps are: a reminder of the static equilibrium conditions and the free body diagram for calculating bending moments and reaction and shear forces; definition of the neutral surface; definition and calculation of the moment of inertia; formulation of the beam differential equation relating the deflection to the bending moment; solution of the beam equation in examples with typical boundary conditions; calculation of the stiffness or elastic constant for microstructures and especially for flexures applying Castigliano’s second theorem; formulation of the rectangular and circular plate differential equation and solution when pressure is applied.